PDT

CUBE 4 Chamber Platform

Flexible design for low CoT and Capacity Requirement

Flexible configuration with up to 4 chambers
Small footprint
Common frame for 6”, 8” and 12” wafers
Low cost of ownership
Chemical reclaim system

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OCTOPUS 16 Chamber Platform

Premium designed for Productivity Enhancement & Low CoT

High throughput productivity enhancement with up to 16 chambers
Most effective transfer system, less wafer handling
Low cost of ownership
Low defectivity design
Adopt industrial proven parts
Chemical reclaim system

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